中文摘要：

建立了悬臂梁位移与外电场和外力之间的动静态模型以及压电陶瓷迟滞环的Backlash算子模型。以所建立的迟滞模型为前馈环节与PID反馈构成复合控制对悬臂梁进行位置控制。现场测试数据验证了该模型的正确性和复合控制方法的可行性，并分别用逆控制、PID控制以及复合控制方法进行了正弦曲线跟踪实验，这些控制方法的比较结果表明，复合控制策略具有最高的控制精度。

英文摘要：

For the microgripper fabricated by a pair of piezoelectric cantilever beams to handle mieroobjects of a sub-millimeter size with the more precise positioning capability, the static and dynamic models between the displacement of the microgripper and the external electric field and force were established, and the hysteretic model of piezoceramics based on Backlash operator was also founded. A hybrid control scheme, including a feedforward segment of the established hysteresis model and a feedback segment of a PID controller, was conducted to perform the position-based impedance control. The testing data of the experiments validated that these established models were correct. The experimental results of the sinusoid tracking by inverse control, PID control and the hybrid control respectively indicated that the hybrid control scheme had the best control accuracy.