中文摘要：

在加工工艺相同的条件下获得待分析表面试样;通过三维表面形貌仪测量获取粗糙表面的几何形貌数据,基于小波变换的方法实现表面形貌的多尺度分解,并滤除基准面;通过灰度共生矩阵方法,计算表面的二阶距/能量、熵、对比度、均匀度四个特征值,进行粗糙表面几何形貌特征值的分析和比较。经小波分析及灰度共生矩阵计算后可知,相同加工参数下的原始表面及各尺度下表面几何形貌的二阶矩/能量、熵、对比度和均匀度都具有很高的相似性,且最大误差〈10%。通过试验数据得出：在相同的加工方法及相同加工参数下获得的粗糙表面,其几何形貌在各个尺度之下都具有很高的相似性,为同类型表面的计算机建模及后续分析提供了依据。

英文摘要：

The specimens to be analyzed were obtained under the same processing conditions;the surface geometry was measured by three-dimension profilometer and decomposed into mttlti-seales by wavelet ,reference surface filtered. Using gray- level co-occurrence matrix, the four characteristic value of rough surfaces （second moment, entropy, contrast and evenness） were calculated,analyzed and compared. Analyzed by wavelet analysis and gray level matrix, the second moment, entropy ,contrast and evenness of the original surface and its components in each scale have high degree of similarity, and the maximum difference is less than 10%. It was found that the geometric morphology of rough surfaces in the same pro-cessing condition have high similarity in all scales ,which helps to construct surfaces in digital and some further researches.