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The AlN layer thickness dependent coherent epitaxial growth, stress and hardness in NbN/AlN nanostru
  • 期刊名称：Surface & Coatings Technology
  • 时间：2013.11.25
  • 页码：367-375
  • 相关项目：氮化铪膜作为新型红外增透保护膜材料的研究
作者： Mao Wen|Hao Huang|Kan Zhang|Qingnan Meng|Xin Li|Lingwei Kong|Chaoquan Hu|Weitao Zheng|
同期刊论文项目
氮化铪膜作为新型红外增透保护膜材料的研究
期刊论文 19
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