中文摘要：

提出了基于超声行波和体积置换原理的超声蠕动微流体驱动模型.阐述了模型的驱动原理;利用有限元模型进行模态分析,预测了振动模态的谐振频率;通过瞬态动力学分析和谐响应分析观察腔体移动情况,得到了模型的幅频响应特性.为准确进行流体驱动效果分析,在模型内部填充流体介质进行声固耦合分析,得到了各个模态的振型和频率.通过对B（0,5）模态进行流固耦合分析,得到了模型内流体的运动情况,流体域的最大前向速度为15.5mm/s,最大体积流量为13.3ml/min.

英文摘要：

Based on the principle of ultrasonic traveling wave and volume displacing mechanism, an ultrasonic peristaltic micro-fluid driving model was presented. Principle of the driving model was introduced and finite element model was developed to predict model inherent frequencies by modal analysis. Transient dynamics analysis and harmonic analysis were done to observe the chambers travelling. Its amplitude-frequency response characteristics were obtained. To analyze the fluid driving effect precisely, fluid was filled in the model to perform acoustic-structure coupling analysis to obtain vibration modes and inherent frequencies of the coupling model. Mode B （0,5）was selected to perform fluid-structure coupling analysis. Transient dynamics analysis was completed to analyze the fluid flow state. The results showed that the maximum velocity in driving direction was 15.5mm/s and the maximum volume rate was 13.3ml/min.