中文摘要：

为提高Ti6Al4V钛合金微动疲劳抗力,利用离子增强磁控溅射沉积技术制备了不同结构的Ti/Mo金属多层膜,评价了膜层的结合强度、韧性、硬度等力学性能和摩擦学性能,对优选出的Ti/Mo多层膜进行微动疲劳试验。研究结果表明：离子增强磁控溅射沉积的Ti/Mo金属多层膜膜层结晶细致,膜基结合强度高,有效地提高了钛合金基材的耐磨性能。调制周期小于200 nm的多层膜呈现出明显的超硬度现象,调制周期为20 nm的多层膜硬度达到最大值。调制周期200 nm的Ti/Mo多层膜结合强度高,强韧综合性能好,具有较好的耐磨和抗疲劳特性,使Ti6Al4V合金的微动疲劳寿命明显提高。

英文摘要：

In order to improve the fretting fatigue resistance of Ti6Al4V titanium alloy,Ti/Mo metallic multilayer films with different periodicity were prepared by ion beam enhanced magnetron sputtering deposition.The mechanical properties including bonding strength,toughness,hardness and tribological performance of the films were evaluated,and the fretting fatigue resistance of the optimized film was investigated.The results indicate that high density,small grain size,and high bonding strength films were deposited using ion beam enhanced magnetron sputtering technique.The wear resistance of the titanium alloy can be improved by Ti/Mo metallic multilayer films.When the periodicity of the multilayer films is less than 200 nm,a super-hardness effect occurs.The surface hardness of Ti/Mo multilayer films with periodicity 20 nm is the highest among the investigated Ti/Mo metallic multilayer films.The fretting fatigue life of Ti6Al4V titanium alloy was improved by the Ti/Mo multilayer film with 200 nm periodicity which had good overall properties including strong adhesion,high hardness,excellent toughness,and high wear and fatigue resistance.