中文摘要：

为了有效提高钛合金耐微动磨损和抗微动疲劳性能，且避免银脆隐患，在Ti811钛合金表面利用离子辅助磁控溅射沉积技术制备了不同调制周期的Ag／Ni金属多层膜，测试了多层膜的结构、结合强度、显微硬度和韧性，研究了不同调制周期的Ag／Ni多层膜对钛合金基材微动磨损和微动疲劳抗力的影响，并与纯Ag膜和纯M膜进行了对比．结果表明：离子辅助磁控溅射技术可以制备出致密度高、晶粒细致、结合强度高的Ag／Ni多层膜，多层膜的硬度随多层膜调制周期的减小而提高，调制周期小于100nm时呈现明显的超硬度现象．Ag/Ni多层膜具有良好的减摩润滑作用和抗疲劳性能，能够显著改善Ti811钛合金耐微动磨损和抗微动疲劳性能，改善效果随多层膜调质周期降低而增大．

英文摘要：

To significantly improve the fretting wear （FW） and fretting fatigue （FF） resistance of titanium alloys and avoid the silver - induced embrittlement damage, the Ag/Ni muhilayer films with different modulation period thickness was prepared on a Ti811 titanium alloy surface by an ion assisted magnetron sputtering deposition （IAD） technique. The structure, bonding strength, micro - hardness and ductility of the multilayer films were measured. The effects of the Ag/Ni multilayer films with different modulation periods on the FW and FF resistance of the titanium alloy substrate were studied, and compared with pure Ag film and Ni film. The results indicated that the IAD technique can prepare Ag/Ni muhilayer films with high density, small grain size, high bonding strength. The micro - hardness of the Ag/Ni multilayer films increased with decreasing the modulation period thickness. The superhardness phenomenon occurred when the modulation period thickness of the muhilayer films was less than 100 nm. The Ag/Ni multilayer films could improve the FW and FF resistance of the Ti811 alloy due to its excellent lubricating and anti -fatigue properties. The FW and FF resistances of the TiS11 alloy increased with decreasing the modulation period thickness of the Ag/Ni muhilayer films.