中文摘要：

提出了一种气流式全方位水平姿态敏感技术。在密闭腔体内有一非闭合环形圈热源，在热源周围设置8根两两相对平行的热电阻丝构成全方位水平姿态敏感元件；通过前置信号电路和数字电路构成信号处理电路，实现倾角电压信号的提取、全方位信号合成和全方位倾角信号的灵敏度补偿。测试结果表明：分辨率优于0．1°，方位角测量范围可达到360°，倾斜角度测量范围可达到20°。这种技术可获得较高的精度和灵敏度，不存在方位角的测试盲点。

英文摘要：

A sensitive mechanism of micromachined airflow omnibearing level posture is introduced. There is a non-closure annulus heat source in the airtight space, and around the heat source, there are eight parallel heat resistance wire composed omnibearing level posture sensitive element. Signal processing circuit is composed of presignal circuit and digital circuit, to obtain voltage, omnibearing signal synthesis and sensitivity compensation of omnibearing tile angle signal. It is testified that resolution is prior to 0.1°, the scope of azimuth is 360°, the scope of tile angle is 20°. The sensor is not only in small size but also in simply crafting. It is good in output consistency of sensitive element and suitable for mass production.