建立了电子散斑干涉测量的专用光路,对金属试件进行了典型的离面位移测量,经过数字图像处理,获得了该试件在一定压力下产生的水平及垂直方向上离面位移的分布曲线.此技术具有全场、非接触、高精度、高灵敏度、不避光、不需要特殊防震、快速实时可在线测量等优点,已经成为全息散斑计量学中最具有实际应用价值的技术.
The beam path of Electronic speckle pattern interferometry(ESPI) was set up and a typical out-of-plane displacement of metals sample was obtained.This technique has many advantages,which includes full-field,non-contact,high-precision,high sensitivity,fast and real-time.Therefore,in the hologram of speckle metrology,electronic speckle pattern interferometry has the highest value.