中文摘要：

由于激光诱导击穿光谱（LIBS）实验数据容易受各种实验条件的影响，所以采集的光谱数据相对标准偏差较大，导致后续的定量分析精度不高。本文采用激光诱导击穿光谱，以高合金钢样品中Si，Cr，Mn，Fe4种元素的特征谱线为对象，系统的研究了各种可能引起光谱数据波动的因素，如激光能量及频率、收集位置、焦深等对光谱实验数据波动性的影响。实验发现，激光能量的稳定、合适的聚焦深度等都是提高灵敏度，降低光谱数据相对标准偏差（RSD）的有效手段，而改变信号采集位置及角度则影响不大。

英文摘要：

Laser-induced breakdown spectrometric perimental conditions, so that the acquired relative （LIBS） determination is susceptible to various exstandard deviation of its experimental data is large, causing poor precision of the successive qualitative analysis. In this paper, the intensity of the characteristic line of Si, Cr, Mn and Fe was determined by LIBS for the purpose of systematically studying the factors that may cause data fluctuation, such as, laser energy and frequency, acquisition position, and focal depth. It was found that the stability of laser energy, proper focal depth, etc. , all can be effective means for enhancing sensitivity and reducing the relative standard deviation （RSD） while the variation of signal acquisition position and angle has little effect.