中文摘要：

针对微小内尺度的精密测量问题介绍了非接触式、补偿式与瞄准触发式等几种测量新技术。分析了每一种测量技术的测量机理，通过对其结构设计分析得出该技术适用的测量范围，并对其测量性能进行了讨论；重点分析了瞄准触发式测量技术，并对其性能进行了比较。最后对微小内尺度的精密测量发展方向进行了总结。

英文摘要：

Several precision measurement techniques for micro-cavity dimension were presented to solve the problem in the field of cavity precision measurement, including non-contact, compensated, and aiming and triggering measurement techniques. For each technique, the measurement principles were analyzed, the measurement ranges were obtained through the design, and the measurement performance was discussed. Three aiming and triggering measurement techniques using optical fiber were mainly analyzed, and their performance was compared. And lastly the development direction of precision measurement for micro-cavity was generalized.