中文摘要：

为了解决微内尺度的精密测量问题,提出了一种基于正交傅里叶-梅林矩（OFMM’s）定位的双光纤耦合瞄准触发式微内尺度测量方法。该方法通过耦合器实现光能量在不同光纤间的反向传输,把双光纤传感器测头的横向位移量转化为光束的偏转量,通过显微成像系统把此偏转量转化为CCD图像捕捉系统更大的横向位移量。为提高测量精度,运用OFMM’s的幅值旋转不变性和独特的图像形状细节特征的描述能力对CCD图像捕捉系统的图像信号进行亚像素定位;根据OFMM’s的实际位置进行补偿以提高输出图像边缘的定位精度,从而提高测量精度。对OFMM’s的定位精度及传感器性能进行了实验验证,并依据JJF（黑）8-2008,利用自行研制的微小孔径测量机实现了对直径为200μm、深2 000μm深盲孔的直径测量,其测量重复性不确定度优于0.25μm。

英文摘要：

In order to measure micro-cavity dimensions precisely,an aiming and triggering measurement method by a double optical fiber coupler based on the location of Orthogonal Fourier-Mellin moments（OFMM＇s） is proposed.By transmitting reversely the light between different optical fibers through the coupler,the method transforms the transverse displacement of the fiber probe into the displacement of laser,and the laser displacement then is transformed into a large displacement of a CCD by a lens.To improve accuracy,the rotation invariance and particular description capability of OFMM＇s is used to locate the edge of image at subpixel,and a compensation based on OFMM＇s real position is proposed to improve the precision of edge location.The location accuracy of OFMM＇s and performance of sensor are experimentally measured.According to JJF（hei）8-2008,the proposed method with a researched micro-hole machine are used to measure the diameter of a blind micro-hole with the depth of 2000 μm and diameter of 200 μm,and the obtained repeatability uncertainty is less than 0.25 μm.