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中文摘要：
空气质量日益恶化问题引起了人们的重视。为了监控空气质量，研究者开发了很多种类的气敏传感器，其中氧化物半导体气敏传感器具有灵敏度高、制造成本低和信号测量手段简单等优点，成为了目前的主流产品。综述了该类型新型传感器的研究进展，介绍了其气敏机理、结构和制作方法，并概述了其存在的问题及今后的发展趋势。
英文摘要：
Recently, the problem of declining air quality has aroused people＇s concern. And, researchers develop various gas sensors to monitor it. Among these sensors, oxide semiconductor gas sensor has its exceptional properties such as high sensitivity, low cost and simple method of measurement, By now, it becomes the main product of gas sensor. The progress, gas-sensing mechanism, sensor structure and fabrication method of this kind of gas sensor are introduced and summarized, and also the problems and developing tendency are pointed out.
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