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Evaluation on 3D micro-ground profile accuracy of micro-pyramid-structured Si surface using an adapt
ISSN号:0141-6359
期刊名称:Precision Engineering
时间:2013
页码:918-923
相关项目:微沟槽功能曲表面的双空间精密机械加工研究
作者:
J. Xie|X.R. Liu|K.K. Wu|Y.J. Lu|P. Li|
同期刊论文项目
微沟槽功能曲表面的双空间精密机械加工研究
期刊论文 20
会议论文 5
获奖 4
专利 3
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