大气压射频等离子体是近几年发展起来的一种新型非平衡等离子体。以氮气掺杂少量氩气为放电气体,实现了大气压射频介质阻挡放电。利用发射光谱对放电进行在线诊断研究,并分析谱线线型,从中分离出谱线的Stark线型,从而计算出放电通道的电子密度。研究了单个放电通道中电子密度的空间分布并测量了通道同一位置的电子密度随放电输入功率的变化。结果显示,在放电通道中部,当放电输入功率由138W增加至248W,电子密度由4.038×1021 m-3升高至4.75×1021 m-3。
The use of high frequency power to generate plas ma at atmospheric pressure is a relatively new development.An apparatus of atmo spheric pressure radio frequency dielectric barrier discharge was constructed.P lasma emission based measurement of electron density in discharge columns from S tark broadening Ar is discribed.The spacial profile of electron density was stu died.In the middle of the discharge column,as the input power increases from 1 38 to 248 W,the electron density rises from 4.038×1021 m-3 to 4.75×1021 m-3.