中文摘要：

采用溶胶-凝胶（sol-gel）法在玻璃衬底上制备了纳米ZnO掺铝薄膜,利用X射线衍射仪（XRD）和透射电镜（TEM）对薄膜的微观结构进行了系统的研究。结果表明,所有在玻璃衬底上生长的ZnO薄膜均具有c轴择优取向。掺杂量为2%（原子分数）时,Al在ZnO薄膜中达到最高水平。过量Al掺杂明显减弱薄膜的c轴择优取向。随着Al掺杂量的增加,ZnO晶粒进一步细化。其原因是未进入ZnO晶格的Al以非晶Al2O3的形式在ZnO晶界上形成了对晶界运动的钉扎,从而阻碍了ZnO晶粒进一步长大。

英文摘要：

The microstructure of Al-doped nano-ZnO thin films deposited on glass substrate by sol-gel method was investigated by X-ray diffraction and transmission electron microscopy. The results show that all the ZnO films prepared on glass substrate have preferred c-axis orientation. XRD reveal that the film with Al content of 2 at % has the highest doping level in ZnO film. Excessive Al-doping can weaken preferred c-axis orientation in the films. The increase of Al content causes the decrease of grain size of ZnO. It is inferred that the surplus Al atoms may form a state of amorphous Al2O3 and pin the movement of ZnO grain boundary, which leads to the decrease of grain size.