采用脉冲激光沉积法在(001)LaAlO3衬底上制备了Sr0.5Ba0.5TiO3/La0.5Sr0.5CoO3薄膜,利用透射电子显微镜对薄膜的微观结构进行了研究。结果表明,底电极La0.5Sr0.5CoO3在LaAlO3衬底上外延生长并形成立方-立方取向关系。不同于块体结构,LSCO薄膜发生了结构转变,形成一种氧缺位有序调制结构。整个薄膜由大量取向畴组成,其中包含一些层错与反相畴界等缺陷。生长温度为500℃时,Sr0.5Ba0.5TiO3薄膜为柱状多晶结构;当温度升高至820℃时,薄膜为缺陷较少的单晶结构。
The microstructure of Sr0.5Ba0.5TiO3 films deposited on (001)LaAlO3 substrate with La0.5Sr0.5CoO3 as bottom electrode by pulsed laser deposition method was investigated by transmission electron microscopy.The results showed that La0.5Sr0.5CoO3 layer was epitaxially grown on LaAlO3 substrate with a cube-cube orientation relationship.A new oxygen-deficient ordering structure was formed due to structural deformation in La0.5Sr0.5CoO3 film,which was different from its counterpart in bulk.The La0.5Sr0.5CoO3 film was consists of numerous orientation domains,some defects such as stacking faults and anti-phase boundaries in the film were also identi-fied.Sr0.5Ba0.5TiO3 film with free oriented columnar polycrystalline was grown on La0.5Sr0.5CoO3 layer at the growing temperature of 500 ℃,however,when the deposition temperature increased to 820 ℃,a perfect sin-gle-crystalline film of Sr0.5Ba0.5TiO3 was obtained.