中文摘要：

采用多弧离子镀制备了TiN／Cu纳米复合膜，通过设计Cu靶的开启方案对涂层进行成分调节，运用正交试验找出了影响膜层硬度的主次因素，并对膜层的成分、结构和性能进行了研究。结果表明，N2分压和Cu元素的加入是影响膜层硬度的主要因素；Cu的加入抑制了TiN晶粒的生长，且随着Cu含量的增加，TiN晶粒逐渐变小，并由柱状晶转变为等轴纳米晶；当Cu含量达到1．4at％时，制备的纳米复合膜具有47．4GPa的超高硬度。

英文摘要：

TiN/Cu nanocomposite films were prepared by multi-arc ion plating, adjusting coating composition was made through designing the on-off project of Cu target, the factors affecting hardness of the films were found out with orthogonal test,and the component,structure and properties of the films were studied. The results show that the pressure of N2 and the addition of Cu are two key factors affecting hardness of the films;the addition of Cu can restrain the growth of TiN grain,and the TiN grain size gradually decreases with the content of Cu in films increasing, the structure of the grain turned from columnar to equiaxed;and the nanocomposite films have the superhardness of 47.4 GPa when the content of Cu reaches 1.4at%