中文摘要：

介绍了共振隧穿效应，并在此基础上利用共振隧穿二极管（RTD）设计了共振隧穿压阻式的微加速度传感器实验检测方案。对所设计的微加速度传感器进行加速度的电压输出线性度、频率响应以及不同偏压下加速度计的灵敏度等进行全面系统测试，并且进行了高低温试验、冲击响应对比分析等相关试验。研究结果为共振隧穿加速度传感器提供了全面、准确的数据，为压阻式RTD传感器的研究提供了可靠依据。

英文摘要：

Resonance tunnelling effect is introduced and the resonant tunnelling piezoresistive micro acceleration sensor experimental detection scheme is designed based on the resonant tunnelling diode （RTD）. The output linearity, frequency response and sensitivity of accelerometer under different bias is comprehensively tested. The high and low temperature experiments and the comparative analysis of impulse response experiments are also conducted. Research results provide comprehensive and accurate datas, and provide reliable basis for resonant tunnelling piezoresistive RTD sensor.