中文摘要：

展示了一种新型的基于硅IC工艺的叠层型螺旋薄膜变压器，通过分析铁氧体的特性和磁谱，设计了薄膜变压器结构和制造工艺。采用光刻技术制备形状相同且完全叠合的初级与次级线圈，提高线圈耦合效率。空心变压器两层线圈之间采用SiO，作为绝缘层；磁芯变压器的两层线圈之间采用射频磁控溅射NiZn铁氧体薄膜作为绝缘层。在10MHz～20GHz的频率范围内分别对空心和磁芯叠层型螺旋薄膜变压器进行了测试，测试结果表明：磁芯薄膜变压器的带宽和传输效率都大于空心薄膜变压器；铁氧体薄膜能大幅度提高薄膜变压器的传输效率；匝数比为10：10的磁芯薄膜变压器传输效率在频率9．85GHz时达到78．0％的最大传输效率。

英文摘要：

The stacked spiral thin-film transformer is designed and fabricated in this paper, . The mechanism of ferrite thin film is discussed. Primary spiral and secondary spiral are on the different layer and have the same shape. Air core transformer and magnetic core transformer are made with SiO2 or ferrite thin film between two spirals respectively. S-parameters are measured at 10MHz-20GHz. The result shows that the transmission efficiency and bandwidth of magnetic core thin- film transformer is better than those of air-core thin-film transformer. The ferrite film can improve the transmission efficiency of thin-film transformer. The transmission efficiency of magnetic core thin-film transformer with turn-number ratio 10：10 is more than 50% at 2.5GHz-2OGHz, and the maximum is up to 78.0% at 9.85GHz.