中文摘要：

采用电化学方法，以分析纯的异丙醇溶液作为碳源，低温（60～70℃）常压条件下，在（100）硅片上沉积了类金刚石薄膜。利用扫描电子显微镜（SEM）、原子力显微镜（AFM）、拉曼光谱仪（Raman）和傅里叶变换红外光谱仪（FTIR）表征了薄膜的表面形貌和结构。结果表明，电解异丙醇溶液可以获得表面均匀致密且sp^3碳含量较高的含氢类金刚石薄膜。

英文摘要：

Diamond like earbon（DLC） films were deposited by liquid electrochemical technique using 2-propanol as electrolyte at low temperature （60-70℃）. The morphology and microstructure of the films were analyzed by scan ning electron microscopy（SEM）, atomic force microscopy（AFM）, Raman spectroscopy and Fourier transform infrared spectroscopy（b-FIR）. The characterizations suggested that hydrogenated DI.C films with smooth and uniform surface and significant sp：~ carbon were successfully deposited.