中文摘要：

利用碱性体系抛光液研究了十二烷基苯磺酸钠（SDBS）缓蚀剂对镁合金化学机械抛光过程和抛光效果的影响。采用能谱仪XPS分析缓蚀剂在镁合金表面形成的膜层成分,并通过腐蚀试验、电化学分析和磨粒粒径测试的手段分析了抛光液中SDBS在镁合金化学机械抛光过程中的作用机理。结果表明：当SDBS含量为1.0%时,抛光液中SDBS可有效抑制镁合金在抛光过程中的腐蚀,缓释效果可达91%。SDBS与镁合金通过缩合反应生成保护膜,减小抛光后的表面粗糙度以及点蚀的出现,提高表面质量;另外,SDBS对Al2O3抛光磨粒具有一定的吸附作用。当SDBS含量为1.0%时,能有效抑制Al2O3磨粒团聚,进而对抛光效果产生一定的影响,减少抛光过程中划痕的产生。

英文摘要：

A series of alkaline polishing slurry were used to investigate the effects of corrosion in-hibitor,sodium dodecyl benzene sulfonate（SDBS）,on Mg alloy.Corrosion test,electrochemical analysis and abrasive article size test were used to study the inhibiting-mechanism of SDBS.The results showed that,SDBS strongly inhibited the corrosion of Mg alloy in polishing slurry.The inhibition efficiency of 1.0% SDBS was more than 91%.SDBS was absorbed on the Mg alloy surface and then formed a protective film by condensation reaction.The protective film decrease the surface roughness,and also increase the friction coefficient in the polishing process.SDBS could be absorbed by Al2O3 polishing particles,which could inhibit the aggregation of particles.Al2O3 abrasive particle agglomeration is suppressed to reduce the scratches in the polishing process when SDBS content is of 1.0%.