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Pull-in voltage analysis of electrostatically actuated MEMS with piezoelectric layers: A size-depend
  • ISSN号：0093-6413
  • 期刊名称：Mechanics Research Communications
  • 时间：2015.6
  • 页码：7-14
  • 相关项目：静电驱动MEMS微结构非线性吸合特性研究- - 理论和数值方法
作者： Xiao, Yue|Wang, Binglei|Zhou, Shenjie|
同期刊论文项目
静电驱动MEMS微结构非线性吸合特性研究- - 理论和数值方法
期刊论文 12
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