中文摘要：

CrAlN涂层具有良好的综合性能,在合金刀具和模具的表面涂覆方面有广泛的应用前景,但其力学性能需要深入的研究。采用电弧离子镀技术制备CrAlN涂层,通过扫描电镜和X射线衍射分析涂层的微观组织结构,测试涂层的显微硬度和涂层与基体的界面结合强度。结果表明,CrAlN涂层含CrN和CrAlN相。涂层的表面形貌和致密性与制备时基体的负偏压和N2/Ar气体流量比有关,基体负偏压和气体流量比升高,CrAlN涂层致密性提高,表面大颗粒减少。涂层的硬度值和Al含量随着气体流量比的增加而提高。涂层/基体的界面结合强度值达65 N。

英文摘要：

CrAlN coatings can be widely used for the protection for the alloys of cutting tools or casting dies.However,the mechanical properties need to be further investigated.The CrAlN coatings were deposited by arc ion plating（AIP） technique.The coating microstructures were analyzed by scanning electron microscope（SEM） and X-ray diffraction（XRD）.The microhardness and adhesive strength of the coatings on the substrate were measured.The results indicated that there are CrN and CrAlN phases in the CrAlN coatings.The microstructures of the CrAlN coatings are related to the substrate bias voltage and the N2/Ar gas flow ratios during AIP deposition.Increasing the substrate bias voltage and the N2/Ar gas flow ratios,the CrAlN coatings became compact and the number of surface macroparticles decreased.The Al contents and the microhardness of the coatings increased with the augmented N2/Ar gas flow ratios.The maximum value of interfacial adhesive strength was 65 N.