中文摘要：

由磁控溅射技术沉积Nb-Cr、Nb-Cr-Al和Al/Nb-Cr 3种涂层，对涂层的微观结构和初期抗氧化性进行研究。结果表明：Nb-Cr涂层呈柱状结构，含Cr 2 Nb相；Nb-Cr-Al涂层为含非晶组织的柱状结构；Al/Nb-Cr复合涂层的内层保留了Nb-Cr的柱状结构，外层无明显特征，涂层包含面心立方（FCC） Al、Cr 2 Nb和NbAl 3等相。在1200℃氧化60 min后，3种涂层显示出不同的氧化增质方式及生成了性质各异的氧化产物：Nb-Cr涂层呈抛物线方式增质，表面产物为Cr 2 O 3和CrNbO 4多孔混合氧化物；Nb-Cr-Al涂层表现出近线性的氧化增质，表面生成以Cr 2 O 3和CrNbO 4为外层、Al 2 O 3为内层的复合氧化物层，氧化膜中有裂纹和脱落，涂层主体呈多孔结构；Al/Nb-Cr复合涂层氧化增质轻微，表面膜以Al 2 O 3为主、连续且致密，涂层中保持高Cr含量，Al/Nb-Cr涂层有较强的抗氧化能力。

英文摘要：

Nb-Cr, Nb-Cr-Al and Al/Nb-Cr coatings were deposited by DC reactive magnetron sputtering and the microstructures and initial oxidation resistance of the three coatings were studied. The results show that the as-deposited Nb-Cr coating is composed of Cr 2 Nb phase and exhibits columnar structure. The Nb-Cr-Al coating is columnar with amorphous phases. The structure of Al/Nb-Cr duplex coatings is a combination of columnar structure in the Nb-Cr and featureless in the Al overlayer. The main phases in the Al/Nb-Cr duplex coatings include FCC Al, Cr2Nb and NbAl3. During thermal exposure at 1 200 ℃ in air for 60 min, the Nb-Cr coating exhibits a parabolic mass gain vs time and the mixture of Cr2O3 and CrNbO4 is formed on the surface. The Nb-Cr-Al coating presents a linear increase in mass gain and the oxidation products are Cr2O3and CrNbO4 on the surface and Al2O3 in the sub-layer. The mass gain is slight and the Cr content remains high in the Al/Nb-Cr coating after exposure. Continuous, dense and mainly Al2O3 scales are formed on the surface. It can be concluded that the Al/Nb-Cr coating possesses strong high temperature oxidation resistance.