中文摘要：

Intrinsic carrier concentration（ni） is one of the most important physical parameters for understanding the physics of strained Si and Si1-xGex materials as well as for evaluating the electrical properties of Si-based strained devices. Up to now, the report on quantitative results of intrinsic carrier concentration in strained Si and Si1-xGex materials has been still lacking. In this paper, by analyzing the band structure of strained Si and Si1-xGex materials, both the effective densities of the state near the top of valence band and the bottom of conduction band（ Nc and Nv） at 218, 330 and 393 K and the intrinsic carrier concentration related to Ge fraction（x） at 300 K were systematically studied within the framework of KP theory and semiconductor physics. It is found that the intrinsic carrier concentration in strained Si（001） and Si1-xGex（001） and（101） materials at 300 K increases significantly with increasing Ge fraction（x）, which provides valuable references to understand the Sibased strained device physics and design.