为提高上海光源搭建的国内首条软x射线谱学显微光束线站的整体性能,分析了其分光装置一变包含角平面光栅单色仪在波长扫描过程中影响谱学显微光束线光斑水平漂移的各个因素,推导出了各因素与光斑水平漂移的传递关系,并结合具体要求进行了误差分配。针对光斑水平角漂移重复精度的检测,采用白准直原理,构建了测试系统。利用该系统,完成了谱学显微光束线站光斑水平漂移重复精度的离线检测,其结果为0.67”,满足设计指标1”的要求。对安装调试后的束线进行了总体性能测试,结果均满足谱学显微设计和使用要求。由此表明,提出的对谱学显微光束线光斑水平漂移误差来源的分析及检测方法,有效保证了束线性能的实现。
With the aim to improve the unified performance of the first soft Xray spectromicroscopic beamline built in Shanghai Synchrotron Radiation Facility(SSRF), This paper analyzes the main fac tors that effect the light spot transversal transfer of the spectromicroscopic beamline during wave length scanning by a variableincludedangle plane grating monochromator. It deduces the relation be tween various factors and light spot transversal transfer, and solves the error distribution of the sys tem to ensure the performance of the beamline. A test system for the repeatability of light spot trans versal transfer is built by auto collimation principle and the offline testing of the light spot transversal transfer is finished by using this test system. The result shows that the repeatability is 0.67", which satisfies the technical requirement of 1". The unified performance for the beamline is tested after it is assembled. Obtained results meet the requirements of design and annliemicm. ~nA r, ,~,~ ~.~t~;..~ness of error analysis and testing for the light spot transversal transfer.