中文摘要：

采用大型真空镀膜设备在玻璃基底上蒸镀二氧化钛（TiO2）薄膜，并对TiO2薄膜进行了SEM、AFM、XRD、紫外可见光吸收光谱、亲水性的测试及分析，探讨了退火温度对薄膜性能的影响。结果表明制备的TiO2薄膜具有良好的均匀性。在室温条件下，TiO2薄膜具有无定型的结构；在300～500℃的条件下，TiO2薄膜退火2h后以锐钛矿晶型为主，600℃退火的TiO2薄膜明显向金红石型转变。随退火温度的升高，薄膜对紫外光和可见光的吸收有明显提高，并出现了明显的红移现象。另外，亲水性也随退火温度的升高而变强，500和600℃退火的TiO2薄膜表面出现超亲水性。

英文摘要：

Titanium dioxide （TiO2） thin films were prepared on glass surfaces by vacuum evaporation and annealed at different temperatures, which provided a good way for large-scale fabrication of titanium dioxide thin films. The materials were measured and analyzed by SEM,AFM,XRD, and UV-vis absorption spectra, hydrophilie property and the influence of annealing temperature had been studied. The results indicated that the thickness of the thin films is uniform. Annealed at a temperature ranging from 300-500℃ for 2h, the amorphous TiO2 film changed to anatase phase while the amorphous TiO2 film is rutile Annealed at 600℃ for two hours. With the increasing of annealing temperatures, the improvement of the absorption of UV-vis, hydrophilic property and the red shift was obvious. And the TiO2 films of annealing at 500 and 600℃ showed the super- hydrophilie property.