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Construction of Larger Area Density-Uniform Plasma with Collisional Inductively Coupled Plasma Cells
  • ISSN号：1009-0630
  • 期刊名称：《等离子体科学与技术：英文版》
  • 时间：0
  • 分类：O433.1[机械工程—光学工程;理学—光学;理学—物理] TM15[电气工程—电工理论与新技术]
  • 作者机构：[1]CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China
  • 相关基金：supported by National Natural Science Foundation of China （Nos. 10675121, 10705028 and 10605025） and National Basic Research Program of China （No. 2008CB717800）
作者： 欧阳亮[1], 刘万东[1], 白小燕[1], 陈志鹏[1], 王慧慧[1], 李弘[1], 罗辰[1], 吉亮亮[1], 胡北[1]
关键词： 碰撞等离子体, 低温等离子体, 光谱测量, 电子温度, 电感耦合等离子体发射光谱, 温度测定, 烟气排放, ABEL变换, continuous emission spectrum, diagnostics, low-temperature plasma, colli- sional plasma
中文摘要：

<正> Continuous emission spectrum measurement is applied for the inconvenient diagnosticsof low-temperature collisional plasmas.According to the physical mechanism of continuousemission,a simplified model is presented to analyze the spectrum in low temperature plasma.Thevalidity of this model is discussed in a wide range of discharge parameters,including electron temperatureand ionization degree.Through the simplified model,the continuous emission spectrumin a coUisional argon internal inductively coupled plasma is experimentally measured to determinethe electron temperature distribution for different gas pressures and radio-frequency powers.Theinverse Abel transform is also applied for a better spatially resoluted results.Meanwhile,theresult of the continuous emission spectrum measurement is compared to that of the electrostaticdouble probes,which indicates the effectiveness of this method.

英文摘要：

Continuous emission spectrum measurement is applied for the inconvenient diagnos- tics of low-temperature collisional plasmas. According to the physical mechanism of continuous emission, a simplified model is presented to analyze the spectrum in low temperature plasma. The validity of this model is discussed in a wide range of discharge parameters, including electron tem- perature and ionization degree. Through the simplified model, the continuous emission spectrum in a collisional argon internal inductively coupled plasma is experimentally measured to determine the electron temperature distribution for different gas pressures and radio-frequency powers. The inverse Abel transform is also applied for a better spatially resoluted results. Meanwhile, the result of the continuous emission spectrum measurement is compared to that of the electrostatic double probes, which indicates the effectiveness of this method.

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期刊信息
  • 《等离子体科学与技术：英文版》
  • 主管单位:中国科学院 中国科协
  • 主办单位:中国科学院等离子体物理研究所 中国力学学会
  • 主编：万元熙、谢纪康
  • 地址：合肥市1126信箱
  • 邮编：230031
  • 邮箱：pst@ipp.ac.cn
  • 电话：0551-5591617 5591388
  • 国际标准刊号：ISSN：1009-0630
  • 国内统一刊号：ISSN：34-1187/TL
  • 邮发代号:
  • 获奖情况:
  • 国内外数据库收录:
  • 美国化学文摘（网络版）,荷兰文摘与引文数据库,美国工程索引,美国剑桥科学文摘,美国科学引文索引（扩展库）,英国科学文摘数据库
  • 被引量:89