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大气压氦气介质阻挡辉光放电的数值仿真计算
  • ISSN号：1003-3076
  • 期刊名称：电工电能新技术
  • 时间：0
  • 页码：4298-4303
  • 语言：中文
  • 分类：O484.1[理学—固体物理;理学—物理] TD712.52[矿业工程—矿井通风与安全]
  • 作者机构：[1]School of Physics and Optoelectronic Technology, Dalian University of Technology,Dalian 116023, China
  • 相关基金：supported by National Natural Science Foundation of China （Nos. 10775026, 50537020, and 50528707）
  • 相关项目：大气压辉光放电的机理研究
作者： 吕博|罗海云|王新新|梁卓|
关键词： 数值模拟, 大气压力, 薄膜沉积, VHF, 密度, 硅烷, SiH3, 物种, plasma, numerical simulation, hydrogen dilution
中文摘要：

E-mail address of corresponding author WANG Dezhen： wangdez@dlut.edu.cn

同期刊论文项目
大气压辉光放电的机理研究
期刊论文 64 会议论文 15
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期刊信息
  • 《电工电能新技术》
  • 北大核心期刊（2011版）
  • 主管单位:中国科学院
  • 主办单位:中国科学院电工研究所
  • 主编：林良真
  • 地址：北京2703信箱
  • 邮编：100190
  • 邮箱：dgdnedit@mail.iee.ac.cn
  • 电话：010-82547196
  • 国际标准刊号：ISSN：1003-3076
  • 国内统一刊号：ISSN：11-2283/TM
  • 邮发代号:82-364
  • 获奖情况:
  • 国内外数据库收录:
  • 俄罗斯文摘杂志,美国剑桥科学文摘,英国科学文摘数据库,日本日本科学技术振兴机构数据库,中国中国科技核心期刊,中国北大核心期刊（2004版）,中国北大核心期刊（2008版）,中国北大核心期刊（2011版）,中国北大核心期刊（2014版）
  • 被引量:6691