中文摘要：

基于Krylov子空间投影法结合有限元分析（FEA）建立了一种宏模型提取方法，以便能够在系统级快速地建立器件宏模型．这种方法通过对整个2D或3D器件有限元分析的结果提取宏模型．基于这种方法建立的宏模型具有计算代价低、精度合适的特点，而且能方便地插入到系统级仿真器进行仿真．文中通过一个谐振器结构阐释了这一方法，并且针对所建立的谐振器结构宏模型进行了精确性验证．

英文摘要：

Based on Krylov subspace projection method and finite element analysis, we had obtained an approach to construct device macromodel. These reduced-order macromodels could be obtained by extracting data from the fully 2D or 3D meshed model runs. The macromodels generated by this method have the characteristics of low computational expense, acceptable precision, easily inserted into a system lever simulator for simulation. As an example, the method was demonstrated by capturing the behavior of a comb resonator, furthermore, the resonator macromodel＇s characteristics were verified with the full finite element model.