中文摘要：

宏模型的获取是由Krylov子空间投影法结合器件级有限元分析的宏建模方法来实现，利用此模型和基于可重用IP设计思想的系统级组件建模方法建立由VHDL-AMS语言描述的梳齿谐振器系统级模型，在华大VDE仿真平台上搭建出了梳齿谐振器的系统模型，并进行一系列的仿真，包括时域阶跃、交流电压信号仿真和频域交流小信号仿真，仿真结果与商用仿真工具ANSYS仿真结果保持良好的一致．

英文摘要：

The system level simulation of macromodel makes great use of the advantage of system level and physical level of MEMS design, makes it convenient to exchange design information between two level, shorten the MEMS design period. The Comb resonator, which is in common use in MEMS area, has been chosen as an example to illuminate the use of macromodel in system level , and the base on reuse intellectual property （IP） method,VHDL-AMS language and Zeni VDE simulation bench are used to implement this method. With the time domain and frequency domain simulation, the precision of macromodel and the short time consumption of simulation are validated compare with the design desire and simulation result of ANSYS, a general FEA simulator.