中文摘要：

用溶胶-凝胶法制备了不同浓度（0、1％、3％、5％（摩尔分数））的Nd掺杂钛酸锶钡（Ba0.65Sr0．35TiO3，BST）薄膜。XRD结果表明，经700℃退火1h后，样品晶化为完整的多晶钙钛矿结构，平均晶粒尺寸为20nm。原子力显微镜（AFM）观察发现，薄膜表面均匀致密，光滑平整。室温光致发光谱（PL）显示在808nm氩离子激光激发下，Nd掺杂的BST薄膜在876、1060、1337nm处有较强的近红外（NIR）发光，分别对应于Nd^3＋的^4F3/2^-4I19／2、^4F3／2^-4I11／2^4F3／2^-4I13／2跃迁。这些结果表明Nd掺杂BST薄膜在激光器和光放大器等光电器件领域有着广泛的应用前景。

英文摘要：

Ba0.65Sr0.35TiO3 （BST） thin films with different Nd-doped concentration have been frabracated on silicon substrates by modified sol-gel process. All the samples were annealed at 700℃for 60min. The structural and morphological properties of the films were examined by X-ray diffraction （XRD） and atomic force microscopy （AFM）. XRD studies indicated that both pure and doped BST thin films show well-crystallized perovskite structures, the particle size is about 20nm. AFM images display the films have high quality and fine-grained polycrystalline structure. The photoluminescence spectra（PL） were carried out using the 808nm Ar^＋ laser line as the excitation source at room temperature. The Nd-doped BST thin films show three NIR luminescence peaks corresponding to ^4F3/2^-4I9/2 transition at 876nm; ^4F3/2^-4I11/2 transition at 1060nm and ^4F3/2^-4I13/z transition at 1337nm respectively. Influence of Nd^3＋ concentration to the microstructure and the luminescence properties were discussed. All the results showed that the Nd-doped BST films may have great potential use for novel integrated optic devices.