中文摘要：

用模板法合成了介孔二氧化硅SBA一15，为了改善其湿敏特性进行了金属盐掺杂。通过扫描电子显微镜（SEM）和XRD对纯质介二氧化硅SBA一15以及不用金属盐掺杂材料的形貌和结构进行了表征。在11％RH到95％RH的范围内研究了纯SBA一15和不同金属盐掺杂SBA一15材料的湿敏特性。结果表明：适量的金属盐掺杂能很好的提高了介孔硅SBA一15材料的湿敏特性。不同金属盐掺杂SBA一15材料的响应恢复时间也比较迅速，响应时间都在60s以内，而恢复时间都在180S以内，能够满足湿度传感器的应用需要。

英文摘要：

The mesoporous silica SAB - 15 material was synthesized by template method. Metal salt were doped in order to improve the humidity sensing properties of the material. The microstructure and morphology of materials were characterized by scanning electron microscope （SEM） and XRD. Humidity sensing properties of pure SBA -15 and metal salt doped SBA -15 were studied from 11% RH to 95 % RH. The results show that appropriate metal salt doped could improve the humidity sensing properties of pure SBA - 15 clearly. The response and recovery time of metal salt doped materials are quite quickly, the response time are all less than 60 s and recovery time are all less than 180 s. All these parameters have achieved the practice application standard.