文中分别以化学沉淀法、柠檬酸法和均相沉淀法制备了NiO纳米材料,通过XRD方法对所制备材料的晶体结构进行分析表征。并以上述不同方法制备的NiO为基体材料,Cr2O3、WO3为掺杂剂制作了电导型厚膜NO2气体传感器。研究了工作温度、掺杂剂等对器件气敏性能的影响。结果表明:掺杂WO,的NiO基厚膜传感器对NO2有较高的灵敏度、良好的选择性及响应特性,并且对器件的敏感机理做了初步的分析。
NiO nano-material was synthesized via chemical precipitation, citric acid method and homogeneous precipitation respectively. The crystalline structure of the materials were analyzed by XRD method. And conductive type thick film NO2 gas sensors were fabricated with NiO which was synthesized by the ohove methods as the sensing material and Cr2O3 , WO3 as the doping agent. The effects of the operating temperature and adulterants etc on the sensing characteristics were investigated. The results showed that there were high sensitivity, well selectivity and response performances for the NiO based thick film sensor to NO2 gas. And the sensing mechanism was investigated preliminarily for the sensor.