中文摘要：

结合光子筛与二元衍射光学元件,提出一种新型的具有更高衍射效率的光子筛——二元光子筛,这种光子筛在对应菲涅尔透光环带及不透光环带上都分布有大量透光小孔,且两种位置处的小孔存在π的位相差。研究了二元光子筛的设计理论方法并根据指标对工作波长为650 nm的二元光子筛进行了设计。通过多次光刻、反应离子蚀刻等微加工工艺制作出二元光子筛;并对其展开如衍射效率、透射波前等特性的测试。

英文摘要：

Based on photon sieve and binary optics element,a novel diffractive element was developed which was called binary photon sieve.Compared with conventional photon sieve which was consist of millions of holes distributing on the corresponding transparent circular rings of the Fresnel zone-plates,binary photon sieve had a higher transmission and diffractive efficiency.The binary photon sieve was consist of millions of holes on both the corresponding transparent and opaque circular ring of Fresnel zone-plates,while there was a π phase shift between this two kinds of holes.The theoretical model of binary photon sieve was established and the binary photon sieve design method was depicted.According to the design method of binary photon sieve,a F10 binary photon sieve was designed for working at 650 nm wavelength.By lithography and reaction ion beam etching（RIBE） technology,a binary photon sieve was fabricated.And also the diffraction efficiency,transmission wavefront of the fabricated binary photon sieve was tested.