中文摘要：

为了克服表面叉指电极d33模式微机电系统（MEMS）悬臂梁振动俘能器中存在的压电材料极化不完全、存在弯曲电场等问题,提出了一种电极贯穿于整个压电层的全d33模式MEMS悬臂梁振动俘能器。根据机电耦合模型,分析了电极尺寸与材料厚度对压电俘能器输出功率的影响。优化结果表明：当硅基底厚度为20μm、电极宽度1μm时,电极间距最优范围为25~75μm,PZT材料最优厚度为7μm,归一化后得到功率密度为34.5 m Wcm-3g-2n。通过在表面叉指电极d33模式俘能器的基础上增加电镀电极工艺,设计了不锈钢基底的全d33模式MEMS俘能器的工艺流程,完成了部分单元工艺。

英文摘要：

A complete d33 mode piezoelectric micro-electro-mechanical system（ MEMS） cantilever energy harvester with interdigital electrode running through piezoelectric layer rather than on surface is proposed. The influence of electrode size and material thickness on the output power is analyzed based on electromechanical model. Optimization results show that when the thickness of the silicon substrate is 20 μm and electrode width is1 μm,the optimal thickness of piezoelectric materials is 7 μm and optimal electrode spacing ranged of 25~ 75 μm,power density is 34. 5 m Wcm- 3g- 2nafter normalization. The fabrication process is designed by adding electrode plating procedures to common d33 mode energy harvester and unit processes are completed.