中文摘要：

在软X射线掠射光学系统筒状反射镜的加工过程中,根据对反射镜内表面镍磷合金镀层的质量要求,采用镍盐还原法对筒状微晶玻璃反射镜的内表面进行了活化,并对在含有30g/LNiSO4.6H2O、30g/LNaH2PO2.H2O、25g/LNa（CH3COO）.4H2O、18g/LC6H8O7、10mg/L添加剂的镀液中沉积镍磷合金镀层的工艺方法进行了探索。对得到的镍磷合金镀层的结合力、抗腐蚀能力等进行了测试。结果表明,采用此法镀制的镍磷合金镀层结合力达到4B级,耐蚀性好,能够满足光学精密抛光的要求。

英文摘要：

According to the quality requirement of nickel phosphorus alloy coating on soft X-ray grazing incidence tube-shaped mirror＇s inner surface for the superpolishing,the mirror inner surface is activated with nickel salt reduction.The nickel-phosphorus alloy is plated with a plating solution containing 30g/L NiSO4·6H2O、30g/L NaH2PO2·H2O、25g/L Na（CH3COO）·4H2O、18g/L C6H8O7、5mg/L additives and the plating condition is studied.Finally,nickel-phosphorus alloy coating adhesion and corrosion resistance are tested.The results show that the adhesion of coating is 4B-class,corrosion resistance is good and it can meet the requirement of superpolishing.