为了在实验室模拟空间环境,检测极紫外太阳望远镜成像质量,提出了由激光等离子光源、Newton型准直光管系统、背照射CCD相机、真空系统等组成的工作波段为17-30nm的极紫外准直光管检测系统,给出了详细的物理分析、光学设计和真空系统设计方法和结果。真空实验测试结果表明,系统在80min内,真空度即可达到5×10^-4Pa的设计指标,满足极紫外波段检测太阳望远镜的要求。
In order to simulate the outer space's vacuum conditions, and to test the performance of a Extreme-Ultraviolet (EUV) solar telescope,a collimator system working in wavelength of 17-30 nm is presented, which consists of a laser produced plasma source, a Newton type collimator, a back illuminating CCD camera and a high vacuum system. The method and result of the physical design, optical System and vacuum system are described in detail. The test result shows the vacuum grade of the system is 5 × 10^-4 Pa after 80 min, and it can meet the test demands of the EUV solar telescope.