中文摘要：

采用非对称双极脉冲磁控溅射制备了一系列不同调制周期的TiN／NbN纳米多层膜，利用X射线衍射分析（XRD）、纳米压痕仪、扫描电子显微镜（SEM）表征了薄膜的微观结构、力学性能和断口形貌。结果表明，在调制周期为19．86nm时，纳米压痕硬度达到43GPa。利用三点弯曲法形成裂纹的扩展，并观察到了裂纹的偏转特征。

英文摘要：

TiN /ZrN multilayers with different modulation periods were prepared by asymmetrical bi- polar pulsed reactive magnetron sputtering. The microstructure, mechanical properties and fracture characteristics of multilayers were investigated by X-ray diffraction, scanning electron microscopy and nonoindentation. The results show that the nanohardness reaches to 43GPa at modulation period 19.86nm. The fracture morphology of TiN/NbN multilayer was observed by SEM after three-point bending test, which reveals that the cracks in the multilayer have a tendency of deflection at the inter- faces and thus a higher cracking resistance of the multilayer can be induced.