中文摘要：

微加速度传感器是微型惯性组合测量系统的核心器件。随着MEMS技术的不断发展，单轴微加速度传感器的技术已日趋成熟，多轴微加速度传感器的研究正成为MEMS领域的热点。基于多轴微加速度传感器典型实例的介绍，评述了近年来该领域的进展，并就其未来的发展作了展望。

英文摘要：

The mieroaccelerometer is an important crucial component of micro inertial measurement unit （MIMU）. With the development of MEMS technology ,technique of the single-axis microaceelerometers is already mature, study on the multi-axis microaccelerometers is becoming the hot issue in MEMS field. Through the introduction of some multi-axis microaccelerometers, new progress and the future trend in this field are discussed.