中文摘要：

为得到高密度的等离子体，设计研制了组合体脉冲真空电弧源，它由4套脉冲真空电弧源组合而成.测量了脉冲真空电弧源弧压与弧流的关系；利用静电探针测量了组合体脉冲真空电弧源和单套脉冲真空电弧源产生的等离子体，得到了探针饱和电流（与等离子体密度成正比）与弧压的关系，以及等离子体密度的轴向分布情况；采用飞行时间方法估测了等离子体的飞行速度.组合脉冲真空电弧源最大等离子体密度达到8×10^12 cm^-3.

英文摘要：

In order to get high density plasma,a combined pulsed vacuum arc source is designed and developed with four pulsed vacuum arc sources.The relationship of arc voltage and arc current is measured;The plasma in combined pulsed vacuum arc source and single pulsed vacuum arc source are measured using electrical probe.The relationship of probe saturation current （in proportion to plasma density）versus arc voltage and axial distribution of plasma are measured;The plasma velocity is estimated using time-of-flight method.The maximal plasma density in combined pulsed vacuum arc source is 8×10^12 cm-3 .