中文摘要：

用磁控射频溅射法制备了FeCoAlOC薄膜,研究了Al-O和C元素的添加对FeCo合金薄膜的软磁性和高频特性的影响.随着Al,O,C元素添加量的增加,薄膜微结构发生了由多晶到纳米晶再到非晶状态的转化,软磁性得到提高;薄膜电阻率则由最初的87μΩ·cm增至900μΩ·cm,高频特性得到改善：截止频率最高可达2.9GHz,低频实部磁导率最高可到达400.

英文摘要：

FeCoAlOC thin films with various C contents were fabricated by magnetron sputtering. The effect of C and Al2O3 addition on magnetic properties and frequency response of FeCo alloy films was studied. The microstructure of FeCo alloy films changed from polycrystalline to nano-crystalline,and became amorphous eventually with the increasing of content of AlO and C. It was found that the soft magnetic properties of FeCo alloy film was improved and resistivity increased from 87 μΩ·cm to 900 μΩ·cm because of C,Al-O addition. Frequency characteristics were improved： the cut-off frequency increased up to 2. 9 GHz,the permeability at low-frequency reached 400.