中文摘要：

为进一步提高彩色滤光片的色度性能和光能利用率,设计了一种宽带宽高透射率的亚微米埋入式光栅结构,该结构由PMMA基底、ZnS膜层、二维Al金属光栅和SiO2覆盖层等组成。采用严格耦合波理论分析了ZnS膜层厚度、周期、占空比等结构参数对透射光谱特性的影响,并在此基础上优化结构参数,获得了宽带宽滤波输出。当透射光谱中心波长为635,530和455nm时,相应透射效率分别为68%,78%和71%,半极大值处全宽（FWHM）约为100nm。计算结果表明,与其他应用于彩色滤光片的光栅结构相比,所设计光栅结构的中心光谱透射效率可提高19%,并有效减少了三色输出光谱之间的重叠区域,提高了彩色滤光片的色度性能。

英文摘要：

In order to improve the light transmission efficiency and to decrease the overlay of tricolor output spectra of a color filter,a 2D submicron embedded grating with a broadband width and high transmission efficiency was proposed.The device is consist of such four parts as a PMMA substrate,a ZnS layer,a metal submicron grating and a SiO2 layer.By the Rigorous Coupled-wave Theory （RCWT）,the effects of the structural parameters on the spectral transmission characteristics were discussed,then three broadband color filters with its full width at half maximum （FWHM） about 100 nm were obtained by optimizing the structural parameters.For the red,green,blue color filters with the center wavelengths of 635 nm,530 nm and 455 nm,their corresponding transmission efficiencies are 68%,78% and 71%,respectively.The numerical results show that the transmission efficiency has increased about 19% as compared to those of previous color filters,while the overlay of the tricolor output spectra is decreased effectively and the transmission characteristics are improved.