位置：成果数据库 > 期刊 > 期刊详情页
Improvement of sensitivity of eddy current sensors for nano-scale thickness measurement of Cu films
  • ISSN号：0963-8695
  • 期刊名称：NDT & E International
  • 时间：2013.10.9
  • 页码：53-57
  • 相关项目：纳米图案的旋转式近场光刻制造系统与关键技术
作者： Zilian Qu|Qian ZHao|Yonggang Meng|
同期刊论文项目
纳米图案的旋转式近场光刻制造系统与关键技术
期刊论文 30 会议论文 2
同项目期刊论文
Experimental Study of the Slider-Lube/Disk Contact State and Its Effect on Head-Disk Interface Stabi
磁头面内运动的测量与抑制
用于近场光刻的表面等离子体透镜的优化设计和加工
Effect of concentration and addition of ions on the adsorption of sodium dodecylsulfate on stainless
Strong Focusing of Plasmonic Lens with Nanofinger and Multiple Concentric Rings Under Radially Polar
Stick-Slip Friction of Stainless Steel in Sodium Dodecyl Sulfate Aqueous Solution in the Boundary Lu
Enhanced optical limiting performance of substitutedmetallo-naphthalocyanines with wide optical limi
Water-Soluble Triarylboron Compound for ATP Imaging In Vivo Using Analyte-Induced Finite Aggregation
Potential-Controlled Boundary Lubrication of Stainless Steels in Non-aqueous Sodium Dodecyl Sulfate
Magnetically controllable Casimir force based on a superparamagnetic metametamaterial
Numerical Analyses of Hydrodynamic Lubrication and Dynamics of the Rolling Piston and Crankshaft in
Effect of Imidazolium Ionic Liquid Additives on Lubrication Performance of Propylene Carbonate under
Outgassing analysis of molecular glass photoresists under EUV irradiation
Intramolecular aggregation and optical limiting properties of triazine-linked mono-, bis- andtris-ph
Molecular Engineering of Aqueous Soluble Triarylboron-Compound-Based Two-PhotonFluorescent Probe for
Control of Friction Distribution on Stainless Steel Surface in Sodium Dodecyl Sulfate Aqueous Soluti
Boundary lubrication by adsorption film
TailorableZero-Phase Delay of Subwavelength Particles toward Miniaturized WaveManipulation Devices
Adhesive and corrosive wear at microscales in different vapor environments
Enhanced optical limiting performance of substituted metallonaphthalocyanines with wide optical limi
In-situ measurement of Cu film thickness during the CMP process by using eddy current method alone
Optimization of structure parameters of concentric plasmonic lens for 355 nm radially polarized illu
微凹坑织构皮秒激光加工及摩擦磨损性能