设计制作了一套以LabVIEW和USB-6009采集卡为检测系统的半导体材料特性检测平台,在温度自主可调的电加热炉的测试环境下,测量不同温度下半导体材料的电阻率和电动势率。测试平台已正式投入运行,在测试过程中实现温度、电压等各项数据的实时处理、显示及保存。根据实验结果可知,系统测量得到的电阻率和电动势率误差控制在允许误差范围以内,实验得到的曲线稳定。
A testing platform was designed to measure semiconductor materials' resistivity rate and electric potential rate in the variable temperature testing environment of electric furnace,which was based on LabVIEW and USB- 6009 acquisition card.The testing platform has already been put into running formally,temperature,voltage and other data were implemented conveniently in real-time. According to the experimental results,the resistivity and electromotive error measured by the system are in permissible error range,and the curve gotten by the experiment is stable.