中文摘要：

通过自组装分子膜（SAMs）方法和有机镀膜技术在Ti-6Al-4V钛合金表面成功制备了三嗪硫醇三乙基硅烷（TES）自组装分子膜（TES-SAMs）和含氟官能团的三嗪硫醇（ATP）复合膜（TES-ATP）.采用X射线光电子能谱仪、接触角测量仪、椭圆偏振光谱仪、原子力显微镜、超景深三维显微镜和UMT-2型摩擦磨损试验机评价薄膜结构及其微摩擦学特性.研究结果表明：TES-SAMs自组装分子膜和TES-ATP复合膜的膜厚分别为3.9和22.2 nm,其对蒸馏水的接触角分别为94.5°和130.5°,呈疏水性.TES-SAMs自组装分子膜和TES-ATP复合膜均能有效降低基体的摩擦系数,TES-SAMs自组装分子膜的摩擦系数稳定在0.23,TES-ATP复合膜的摩擦系数为0.17,而空白基体的摩擦系数为0.50;同时TES-ATP复合膜还表现出良好的抗磨性能.

英文摘要：

6-（3-triethoxysilylpropylamino）-1,3,5-triazine-2,4-dithiol monosodium（TES） and 6-（N-allyl-1,1,2,2-tetrahydroperfluorodecylamino）-1,3,5-triazine-2,4-dithiol monosodium（ATP） were used to formation of TES-SAMs and TES-ATP composite films on the surface of Ti-6Al-4V titanium alloy by the self-assembled monolayers（SAMs） method and polymer plating technique.The structures of TES-SAMs and TES-ATP composite films were characterized by X-ray photoelectron spectroscopy,contact angle meter,spectroscopic ellipsometer,atomic force microscopy.The UMT-2 tribometer and digital microscopy were utilized to investigate the micro-tribological properties of the films.The experimental results show that the thicknesses of TES-SAMs and TES-ATP composite films were 3.9 and 22.2 nm and their contact angles of distilled water were 94.5°and 130.5°,respectively,which indicates the surfaces of TES-SAMs and TES-ATP composite films were hydrophobic.The friction coefficient was effectively reduced from 0.50 for substrate to 0.23 of TES-SAMs and 0.17 of TES-ATP composite films.Moreover,TES-ATP composite films possessed excellent antiwear ability.Therefore,this novel technology is provided to improve the tribological properties in MEMS/NEMS.