中文摘要：

In this work, TeO0.7thin films were prepared by the reactive magnetron-controlling sputtering method. Complex gray-scale patterns were successfully fabricated on TeO0.7thin films through the laser direct writing method.The structural origin of TeO0.7thin film was investigated for gray-scale pattern formation. It is found that multiple gray-scale levels are dependent on the 'virtual' bandgap energy of TeO0.7thin films. The bandgap energy changes lead to refractive index and reflectivity difference. Thus, gray-scale tones can be formed. By accurately controlling laser energy, various 'virtual' bandgaps can be generated in TeO0.7thin films, and colorful gray-scale levels can be formed. Experimental results indicate that TeO0.7thin film can be used as micro/nano image writing material.

英文摘要：

In this work, TeO0.7 thin films were prepared by the reactive magnetron-controlling sputtering method. Complex gray-scale patterns were successfully fabricated on TeO0.7 thin films through the laser direct writing method. The structural origin of TeO0.7 thin film was investigated for gray-scale pattern formation. It is found that multiple gray-scale levels are dependent on the 'virtual' bandgap energy of TeO0.7 thin films. The bandgap energy changes lead to refractive index and reflectivity difference. Thus, gray-scale tones can be formed. By accurately controlling laser energy, various 'virtual' bandgaps can be generated in TeO0.7 thin films, and colorful gray-scale levels can be formed. Experimental results indicate that TeO0.7 thin film can be used as micro/nano image writing material. (C) 2016 Chinese Laser Press