锑铋合金薄膜是一种新型超分辨光学功能材料,了解它的基本光学性质对其在光学信息存储及光子器件应用方面具有重要意义。用磁控溅射法制备了不同成分的锑铋合金薄膜(Sb1-XBiX,X=0,0.1,0.2,0.3,0.88,1),用椭圆偏振法测量了薄膜的光学常数(折射率n和消光系数k)。研究表明,在可见光波段(300~850nm),锑铋合金膜的折射率和消光系数都随着铋含量的增加而减小,且薄膜折射率和消光系数同时随波长的增加而增加,折射率呈现反常色散特性。用原子力显微镜、X射线衍射仪研究了成分变化对薄膜表面形貌和微结构的影响。研究表明,锑铋合金薄膜的微观结构呈现多晶态,晶化程度随着铋含量的增加而增加,这可能是影响其光学常数变化的主要因素。
Antimony-Bismuth alloy is a new functional material for optical super-resolution.It is very important to understand its fundamental optical properties for its applications in optical memory and other photonic devices.Antimony-bismuth alloy films: Sb1-XBiX(X=0,0.1,0.2,0.3,0.88,1) are prepared by magnetron sputtering method.Optical constants(refractive index nand extinction coefficient k) of these films are measured by spectroscopic ellipsometer.Results indicate that both refractive index n and extinction coefficient k of the SbBialloy films decrease with rising concentration of bismuth in the visible wavelength range.The refractive index n of SbBi alloy films increase with increasing wavelength,showing the films possessed anomalous dispersion characteristics.The effects of bismuth composition on the surface morphology and microstructure of the films are studied by atomic force microscope and X-ray diffraction analysis respectively.The SbBi alloy films are at polycrystalline states and its crystallization extent increases with rising concentration of bismuth.This may be the major factor influencing its optical constants.