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中文摘要：
在地下资源勘探中，地震检波器是一种将机械振动转化为电信号的专用检波器。主要从MEMS数字检波器的内部结构和工作原理入手，提出一种MEMS传感器内部结构的模拟方法。该方法采用脉宽调制发生器、二极管、控制电压和常量等模块模拟可变差动电容，运用可编程模块S-function实现地震信号的输入，输出电路由传递函数、零阶保持器和模数转换等模块组成。该模拟方法可以调节系统中的各个参数，为硬件的设计提供更多的依据。输入地震信号与输出信号的对比可见该模拟方法能够有效的采集和传输地震信号。
英文摘要：
In the underground mineral resources exploration,the geophone is a special sensor which can translate the mechanical vibration into the electrical signal.This paper researches on the micro-electro-mechanical system（MEMS） digital geophone which is the one of the most advanced geophones at present.Based on the analysis of the internal structure and work principle of MEMS digital geophone,a simulation method of MEMS sensor′s internal structure is proposed.The Pulse-Width Modulation（PWM） generator,diode,controlled voltage source and the object constant are uesd to simulate the differential capacitor.The program module S-function is used to input seismic signal.The output module constitutes of transform function,zero-oder hold and the Analog to Digital Converter（ADC）.With the help of the above measure,this simulation method can be of very good help for the adjustment of the parameters to supply the fundamental for the hardware designing.From the results of the experiments,it is clear that the simulation method proposed in the paper is effective and feasible.
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