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Stress-driven and Carbon-assisted Growth of SiOxNy Nanowires on Photoresist-derived Carbon Microelec
  • ISSN号：1057-7157
  • 期刊名称：Journal of Microelectromechanical Systems
  • 时间：0
  • 页码：1445-1451
  • 相关项目：面向仿生分级多层微纳结构的跨尺度设计优化和制备新方法
作者： Lei Zhang|Tielin Shi|Zirong Tang|Dan Liu|Shuang Xi|
同期刊论文项目
面向仿生分级多层微纳结构的跨尺度设计优化和制备新方法
期刊论文 17 会议论文 5
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